Course Description

Duration 2 day(s)

Language English    Venue Munich, Germany

Country 

Course fee 613,00    Currency EURO    Discount 30% for Academic members

Description
Modeling and numerical simulation of the fabrication process and the operation of microdevices
and entire integrated microsystems are becoming indispensable in the development of MEMS.
Computer-aided design (CAD) can significantly reduce the number of costly trial and error steps
on the way to an optimized prototype. Complete CAD systems for the predictive simulation of all
design levels from the layout to the system operation are just emerging and not well established,
yet. Nevertheless, there are already numerous tools available to the designer of microsystems which avoid the traditional cut and try approach by the deliberate use of process,
device and system simulators.By the end of the course, participants will have a greater knowledge
of simulation methodology and the capabilities of existing tools with emphasis on the judicious
interpretation of the results, which is the key issue for using simulation programmes with success.

Course Contents and Time Table
· CAD of MEMS: objectives, approaches, state of the art.
· Layout design in bulk micromachining.
· Demo of etch simulation.
· Modeling of fabrication processes for MEMS.
· Microdevice simulation.
· Macromodels and full system simulation.
· Practical demonstrations.

Audience
R & D staff from companies and institutes involved in the development of
microdevices and microsystems.

Lecturers
A course developed by the Institute for Physics of Electrotechnology,
TU Munich (D), in collaboration with the Institute for Microtechnology and
Information Technology, Villingen (D).
Responsible tutor : Prof. Dr. G. Wachutka, TU Munich.

Further information
FSRM
Rue Jaquet-Droz 1
CH-2007 Neuchâtel
Tél +41 32 720 09 00
fsrm@fsrm.ch