Course Description

Duration 2 day(s)

Language English    Venue Besançon, France

Country 

Course fee 613,00    Currency EURO    Discount 30% Academic members

Description
A unique opportunity to practice micromachining technology in a clean room environment is
provided: Participants will carry out the main process steps for the fabrication and the
testing of a micromechanical device (bimorph cantilever at Besan? and electrostatic actuator
for fiber optics applications at Neuch?l) with professional support from the staff of the
hosting laboratory.

Course Contents and Time Table
· Clean room equipment
· Overview of mask design and FEM simulation
· Overview of the fabrication process
· Work in clean room :
Oxidation
Photolithography
Aluminium deposition
Wet etching of oxide
Dry etching of silicon
Test of the microactuators
Packaging of microactuators

Audience
This course is designed to give the possibility to anyone involved or interested in
microsystems technology to get a real, practical idea of the fabrication processes.

Lecturers
A course developed by the University of Neuchâtel IMT (CH) in collaboration with the
University of Twente - MESA (NL), the Institut des Microtechniques de Franche-Comté (F)
and the Hahn-Schickard Gesellschaft - IMIT (D). Tutors will be from the laboratory hosting
the course.

Further information
FSRM
Rue Jaquet-Droz 1
CH-2007 Neuchâtel
Tél +41 32 720 09 00
fsrm@fsrm.ch